Dielectric formed by a thin-layer polymer, a process for producing said layer and electrical capacitors comprising this dielectric
Apparatus for fabrication of magnetic recording media Patent #: 4220117
ApplicationNo. 06/181691 filed on 08/27/1980
US Classes:118/718, Running length work118/50.1, With means to apply electrical and/or radiant energy to work and/or coating material118/719, Multizone chamber118/721, Substrate contacting mask118/723E, Having glow discharge electrodes (e.g., DC, AC, RF, etc.)118/723VE, Vacuum evaporation means within deposition chamber (e.g., activated reactive evaporation, etc.)118/730Rotary
ExaminersPrimary: Smith, John D.
Assistant: Plantz, Bernard F.
Attorney, Agent or Firm
International ClassesC23C 14/56 (20060101)
H01G 4/14 (20060101)
Foreign Application Priority Data1979-12-28 DE
AbstractApparatus for generating layers on a carrier film wherein a plurality of glow polymerization layers and intervening metal layers are applied to a carrier foil 3 on a continuous process. The carrier foil is passed over a drum 4 and conducted through a first vacuum system wherein glow polymerization electrodes apply glow polymerization layers to the foil then the foil passes through a vacuum lock into a second vacuum chamber wherein a metallization device 10 is situated so as to apply a metallization layer. Then the foil passes through a second vacuum lock to the first vacuum chamber wherein a second polymerization layer is applied over the metallization layer. A diaphragm strip 19 also passes over the foil and is continuously used during the polymerization and metallization steps.