Semiconductor variable capacitance pressure transducer assembly
Patent 4277814 Issued on July 7, 1981. Estimated Expiration Date: 
September 4, 1999. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
September 4, 1999. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3456159 3619742 3748571 3780352 3808480 3858097 Packaging of pressure sensor cells Patent #: 4128006 InventorsAssigneeApplicationNo. 06/072503 filed on 09/04/1979US Classes:361/283.1, Pressure361/773, Shaped lead on components73/724CapacitiveExaminersPrimary: Goldberg, E. A.Attorney, Agent or FirmInternational ClassG01L 9/00 (20060101)AbstractA capacitive pressure transducer assembly having a semiconductor transducer device, a substrate, and a cover for use in conducting a fluid pressure to be sensed to the exterior surfaces of the transducer device. The transducer device may have a glass, silicon or other nonconductive material as a base on which a metal capacitor plate is formed. The other capacitor plate may be formed of doped silicon or other semiconductor material. Also, the substrate on which the transducer device is mounted may have additional and related circuitry implemented in thick film technology (ceramic substrate) or integrated circuit technology (semiconductor substrate).Other References
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