Microanalysis by pulse laser emission spectroscopy
Patent 4259574 Issued on March 31, 1981. Estimated Expiration Date: 
November 6, 1999. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 6, 1999. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3832558 Method of discriminating between dyed particles and background fluorescence of the dye Method and apparatus for improved analytical fluorescent spectroscopy Fluorescent microanalytical system and method for detecting and identifying organic materials Patent #: 4087685 InventorsApplicationNo. 06/091855 filed on 11/06/1979US Classes:250/302, RADIATION TRACER METHODS250/461.1With ultraviolet sourceExaminersPrimary: Anderson, Bruce C.Attorney, Agent or FirmInternational ClassG01N 21/64 (20060101)AbstractA system for detecting and identifying the composition of a material, such as semiconductor wafers and chips, subject to one or more stages of processing. The material is laser irradiated to induce molecular fluorescence with means to detect the decay rate of the fluorescence. The decay rate is then compared with a decay record of fluorescence of acceptable modifications of the material, inclusive of amalgamated contaminants or impurities (e.g. doped regions) to determine the state of the modification of the material.Field of SearchRADIATION TRACER METHODS | |
