Method of discriminating between dyed particles and background fluorescence of the dye
Method and apparatus for improved analytical fluorescent spectroscopy
Fluorescent microanalytical system and method for detecting and identifying organic materials Patent #: 4087685
AbstractA system for detecting and identifying the composition of a material, such as semiconductor wafers and chips, subject to one or more stages of processing. The material is laser irradiated to induce molecular fluorescence with means to detect the decay rate of the fluorescence. The decay rate is then compared with a decay record of fluorescence of acceptable modifications of the material, inclusive of amalgamated contaminants or impurities (e.g. doped regions) to determine the state of the modification of the material.
Field of SearchRADIATION TRACER METHODS