Method for manufacturing a target for an image pickup tube
Semiconductor camera-tube target Patent #: 3988758
ApplicationNo. 05/910344 filed on 05/30/1978
US Classes:427/74, Photoelectric427/248.1, COATING BY VAPOR, GAS, OR SMOKE427/75Mosaic or nonuniform coating
ExaminersPrimary: Hoffman, James R.
Attorney, Agent or Firm
International ClassC23C 14/08 (20060101)
Foreign Application Priority Data1976-02-20 JP
AbstractA method for forming a thin film of cerium oxide as a blocking layer which constitutes a portion of a photoelectric film of a blocking type image pickup tube is disclosed. A substrate deposition rate in a vacuum deposition process is established in a range between 0.01 to 0.6 A/sec to prevent the deposition of particles which result in black or white spots in a picture image. It is more effective to select a particle size of 5 μ or more for the primary particles to be deposited.