Apparatus for handling workpieces such as semiconductor substrates
Furnace for practising temperature gradient zone melting Patent #: 4097226
ApplicationNo. 05/917492 filed on 06/21/1978
US Classes:219/388, With means whereby material to be heated may be passed continuously through heated area (e.g., conveyor)219/405, Including heat energy reflecting or directing means219/411, With infrared generating means392/411, Lamp banks (i.e., array of plural lamps)432/120, WORK CHAMBER HAVING HEATING MEANS432/231Article engaging and retaining support fixes position of article relative to heat emitter
ExaminersPrimary: Goldberg, Elliot A.
Assistant: Roskoski, Bernard
Attorney, Agent or Firm
International ClassesC30B 13/02 (20060101)
C30B 13/00 (20060101)
H01L 21/00 (20060101)
AbstractAn apparatus for practicing temperature gradient zone melting simultaneously on a plurality of semiconductor bodies comprises a closable work chamber for receiving the bodies for processing; a heat source disposed in the work chamber and comprising a first closure member thereof; a heat sink disposed in the work chamber and comprising a second closure member thereof and means for transferring one or more bodies of semiconductor material to the work chamber for processing and from the work chamber subsequent to processing. The transferring means comprises manipulative means for selectively engaging the semiconductor bodies and supporting the bodies in transit and drive means for moving the manipulative means toward and away from the work chamber and orienting the manipulative means with respect to the semiconductor bodies.
Field of SearchHEAT GENERATOR WITH AN ASSOCIATED WORK SUPPORT OR HEAT DELIVERY STRUCTURE
WITH MEANS RECEIVING WORK FROM WORK HEATING ZONE DISCHARGE MEANS
WITH MEANS SUPPLYING WORK TO WORK FEEDER
Having means by which work is progressed or moved mechanically
Means moving or guiding work relative to heat emitter during heating