Apparatus for practicing temperature gradient zone melting
Patent 4224504 Issued on September 23, 1980. Estimated Expiration Date: 
June 21, 1998. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
June 21, 1998. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 2881929 3209923 3476632 3666907 3891205 Apparatus for handling workpieces such as semiconductor substrates Furnace for practising temperature gradient zone melting Patent #: 4097226 InventorsApplicationNo. 05/917492 filed on 06/21/1978US Classes:219/388, With means whereby material to be heated may be passed continuously through heated area (e.g., conveyor)219/405, Including heat energy reflecting or directing means219/411, With infrared generating means392/411, Lamp banks (i.e., array of plural lamps)432/120, WORK CHAMBER HAVING HEATING MEANS432/231Article engaging and retaining support fixes position of article relative to heat emitterExaminersPrimary: Goldberg, Elliot A.Assistant: Roskoski, Bernard Attorney, Agent or FirmInternational ClassesC30B 13/02 (20060101)C30B 13/00 (20060101) H01L 21/00 (20060101) AbstractAn apparatus for practicing temperature gradient zone melting simultaneously on a plurality of semiconductor bodies comprises a closable work chamber for receiving the bodies for processing; a heat source disposed in the work chamber and comprising a first closure member thereof; a heat sink disposed in the work chamber and comprising a second closure member thereof and means for transferring one or more bodies of semiconductor material to the work chamber for processing and from the work chamber subsequent to processing. The transferring means comprises manipulative means for selectively engaging the semiconductor bodies and supporting the bodies in transit and drive means for moving the manipulative means toward and away from the work chamber and orienting the manipulative means with respect to the semiconductor bodies.Field of SearchHEAT GENERATOR WITH AN ASSOCIATED WORK SUPPORT OR HEAT DELIVERY STRUCTUREWITH MEANS RECEIVING WORK FROM WORK HEATING ZONE DISCHARGE MEANS WITH MEANS SUPPLYING WORK TO WORK FEEDER Having means by which work is progressed or moved mechanically Means moving or guiding work relative to heat emitter during heating | |
