Method of producing a high vacuum in a container
Patent 4181161 Issued on January 1, 1980. Estimated Expiration Date: 
October 13, 1998. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
October 13, 1998. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 2408614 3009828 3181775 InventorAssigneeApplicationNo. 05/951241 filed on 10/13/1978US Classes:141/8, Vacuum118/666, Temperature responsive118/724, By means to heat or cool141/65, EVACUATION APPARATUS34/92, Vacuum427/248.1, COATING BY VAPOR, GAS, OR SMOKE432/205Having pump, jet or valve means establishing chamber pressure distinct from ambientExaminersPrimary: Schmidt, Frederick R.Attorney, Agent or FirmInternational ClassesC23C 14/56 (20060101)B01J 3/00 (20060101) Foreign Application Priority Data1977-10-20 CHAbstractA method of producing a high vacuum in a container which has limiting walls hich define a reaction chamber which is adapted to be evacuated for vacuum processing purposes, and in which gases are sorbed during vacuum operation and the gases are removed subsequently by increasing the temperature of the walls and evacuating the chamber at the same time includes heating the reaction chamber, sensing the underpressure in the reaction chamber and controlling the heating of the chamber in accordance with the sensed pressure in a manner such that the underpressure remains within a preselected upper and lower limit value until a predetermined temperature of the walls is attained. | |
