U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Vapor desposition method

Patent 4061800 Issued on December 6, 1977. Estimated Expiration Date: Icon_subject December 6, 1994. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

2440135

2584660

2910039

3281517

3446936

3574650

3690933

Feed search system for optical disk recording device Patent #: 5598384
Issued on: 01/28/1997
Inventor: Aoshima, et al.

Inventor

Application

No. 05/652774 filed on 01/27/1976

US Classes:

427/568, Silicon containing coating supply or source118/726, Crucible or evaporator structure392/387, Method392/389, With crucible427/591Induction or dielectric heating

Examiners

Primary: Newsome, John H.

Attorney, Agent or Firm

International Class

C23C 14/24 (20060101)

Abstract

Method and apparatus for effecting vapor deposition of a material on an object. The material is vaporized in a closed chamber, and the pressure is allowed to build up in the chamber as the material vaporizes. Thereafter, the chamber is opened, and the vapor is applied to the object in a super-heated, high pressure state. If desired, additional materials can be injected into the chamber and added to the vapor before the chamber is opened.

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