Feed search system for optical disk recording device Patent #: 5598384
ApplicationNo. 05/652774 filed on 01/27/1976
US Classes:427/568, Silicon containing coating supply or source118/726, Crucible or evaporator structure392/387, Method392/389, With crucible427/591Induction or dielectric heating
ExaminersPrimary: Newsome, John H.
Attorney, Agent or Firm
International ClassC23C 14/24 (20060101)
AbstractMethod and apparatus for effecting vapor deposition of a material on an object. The material is vaporized in a closed chamber, and the pressure is allowed to build up in the chamber as the material vaporizes. Thereafter, the chamber is opened, and the vapor is applied to the object in a super-heated, high pressure state. If desired, additional materials can be injected into the chamber and added to the vapor before the chamber is opened.