"Flight by machines heavier than air is unpractical and insignificant, if not utterly impossible."
Simon Newcomb, astronomer ; Said in 1902, less than two years before the first flight at Kitty Hawk
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| Number | Title | Issue Date |
| 8114751 | Multi-angle rotation for ion implantation of trenches in superjunction devices A method of manufacturing a semiconductor device includes providing a semiconductor wafer and forming at least one first trench in the wafer having first and second sidewalls and a first orientation on the wafer. The first sidewall of the at least one first trench i... | 02/14/2012 |
| 8012806 | Multi-directional trenching of a die in manufacturing superjunction devices A method of manufacturing a superjunction device includes providing a semiconductor wafer having at least one die. At least one first trench having a first orientation is formed in the at least one die. At least one second trench having a second orientation that is ... | 09/06/2011 |
| 7723172 | Methods for manufacturing a trench type semiconductor device having a thermally sensitive refill material Methods for manufacturing trench type semiconductor devices containing thermally unstable refill materials are provided. A disposable material is used to fill the trenches and is subsequently replaced by a thermally sensitive refill material after the high temperatu... | 05/25/2010 |