A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump wi...
|6814550||Vacuum pump with vibration absorber|
A vacuum pump (1) includes a housing (2) in which a suction inlet opening (5) is defined. A vibration absorber (7) includes a suspension body (8) and an absorber jacket (9). The housing (2) of the vacuum pump (1
|6599084||Rotor fixture for a friction vacuum pump|
A friction pump (1), such as turbomolecular pump, includes a steel housing (2) in which a steel shaft (15) is supported by a bearing (16). A rotor (4) with a central bore (21) is mounted on the shaft. In order to reduce the risk of the joint area between ...
|6457954||Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump|
A friction vacuum pump (1) with a frame (5), stator (3), rotor (4) and housing; all functional elements of the pump are combined into one unit (22), which, in turn, can be inserted into a housing (19, 55) that has been adapted to a specific application; u...
|6435811||Friction vacuum pump with a stator and a rotor|
The invention relates to a friction vacuum pump (1) with a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) with one gas inlet (23, 28) each, as well as with junction for the pump stages, which are equipped with junction openin...