|8237116||GC-MS analysis apparatus|
GC-MS analysis apparatus has an interface section between GC and MS sections, which is located with respect to the direction of an analyte flow downstream of the GC section and upstream of the MS section. The interface section comprises at least one membrane with at...
|7334481||Pressure sensor with improved vibrating microassembly and optical detection system|
A pressure sensor made of a wafer with a pair of parallel silicon layers and a silicon oxide layer there between, comprises a vibrating microassembly formed as a silicon beam, which is arranged in a plane perpendicular to the silicon layers and fastened to a support...
|7083398||Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages|
A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in ord...
A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15′) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21′), which makes the a...
|7049823||Ionization vacuum gauge|
An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technolog...
|7030620||Ionization vacuum gauge|
The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (17