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| Number | Title | Issue Date |
| 7102871 | Electrostatic chuck assembly having disassembling device A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ... | 09/05/2006 |
