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Inventor: Vincent K. Luciani


Address: Maple Grove, MN
No. of patents: 1
Last patent issue date: 06/14/2005

NumberTitleIssue Date
6905613Use of an organic dielectric as a sacrificial layer
A method for using an organic dielectric as a sacrificial layer for forming suspended or otherwise spaced structures. The use of an organic dielectric has a number of advantages, including allowing use of an organic solvent or etch to remove the sacrificial layer. O...
06/14/2005
 
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