|6726803||Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity|
A discharge tube is assembled from three sections formed of metal. A first discharge tube element and a second discharge tube element are connected with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both disch...
|6401653||Microwave plasma generator|
A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking...