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| Number | Title | Issue Date |
| 8236159 | Electrolytic process using cation permeable barrier Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a... | 08/07/2012 |
| 8123926 | Electrolytic copper process using anion permeable barrier Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a... | 02/28/2012 |
| 7628898 | Method and system for idle state operation Methods and systems for electrochemically processing microfeature workpieces are described herein. In one embodiment, a process for electrochemically treating a surface of a plurality of microfeature workpieces in an electrochemical treating chamber that includes a ... | 12/08/2009 |
| 7252714 | Apparatus and method for thermally controlled processing of microelectronic workpieces Apparatus and method for thermally controlled processing of microelectronic workpieces with liquids. An apparatus in accordance with and embodiment of the invention includes a process vessel configured to carry a processing liquid, such as an electroless processing ... | 08/07/2007 |
| 7135404 | Method for applying metal features onto barrier layers using electrochemical deposition The present invention is directed to a process for producing structures containing metallized features for use in microelectric workpieces. The process treats a barrier layer to promote the adhesion between the barrier layer and the metallized feature. Suitable mean... | 11/14/2006 |
