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| Number | Title | Issue Date |
| 5635730 | Superconducting oxide thin film device A superconducting oxide thin film device is composed of a LaAlO3 substrate and a YBCO thin film with a BaCeO3 buffer layer disposed between the two. The adhesion between the film and the substrate is increased by the presence of the ... | 06/03/1997 |
| 5397420 | Fine structure forming device A micro machining apparatus forms a high-aspect structure having an optional depth in a workpiece at low cost. The apparatus applies high-frequency electric power to the workpiece and a machining electrode, to form a plasma zone in the vicinity of the lea... | 03/14/1995 |
