|5635730||Superconducting oxide thin film device|
A superconducting oxide thin film device is composed of a LaAlO3 substrate and a YBCO thin film with a BaCeO3 buffer layer disposed between the two. The adhesion between the film and the substrate is increased by the presence of the ...
|5397420||Fine structure forming device|
A micro machining apparatus forms a high-aspect structure having an optional depth in a workpiece at low cost. The apparatus applies high-frequency electric power to the workpiece and a machining electrode, to form a plasma zone in the vicinity of the lea...