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Inventor: Neng-Kuo Chen


Address: Hsinchu, TW
No. of patents: 10
Last patent issue date: 01/12/2010

NumberTitleIssue Date
7645712Method of forming contact
A substrate having at least two metal oxide semiconductor devices of a same conductive type and a gap formed between the two devices is provided. A first stress layer is formed over the substrate to cover the metal-oxide semiconductor devices and the substrate, fill...
01/12/2010
7585790Method for forming semiconductor device
A method of forming a semiconductor device. The method comprises steps of providing a substrate having a first transistor, a second transistor and non-salicide device formed thereon and the conductive type of the first transistor is different from that of the second...
09/08/2009
7566668Method of forming contact
A method of forming a contact is provided. A substrate having at least two metal oxide semiconductor devices is provided and a gap is formed between the two devices. A first stress layer is formed over the substrate to cover the metal-oxide semiconductor devices and...
07/28/2009
7544603Method of fabricating silicon nitride layer and method of fabricating semiconductor device
A method of fabricating a silicon nitride layer is described. First, a substrate is provided. Then, a silicon nitride layer is formed on the substrate. The silicon nitride layer is UV-cured in an atmosphere lower than the standard atmospheric pressure. Through the U...
06/09/2009
7485515Method of manufacturing metal oxide semiconductor
A method of forming compressive nitride film is provided. The method includes performing a chemical vapor deposition (CVD) process to form a nitride film on a substrate, and the method is characterized by adding a certain gas, selected from among Ar, N2, ...
02/03/2009
7332447Method of forming a contact
A method of forming a contact is provided. A substrate having at least two metal oxide semiconductor devices is provided and a gap is formed between the two devices. A first stress layer is formed over the substrate to cover the metal-oxide semiconductor devices and...
02/19/2008
7294572Method of forming contact
A method of forming a contact is provided. A substrate having at least two conductive devices is provided. A spacing is located between the two conductive devices. A first dielectric layer is formed over the substrate to cover the two conductive devices and the spac...
11/13/2007
6989337Silicon oxide gap-filling process
A silicon oxide gap-filling process is described, wherein a CVD process having an etching effect is performed to fill up a trench with silicon oxide. The reaction gases used in the CVD process include deposition gases and He/H2 mixed gas as a sputtering-e...
01/24/2006
6913978Method for forming shallow trench isolation structure
A method of fabricating a shallow trench isolation structure is disclosed. On a substrate, a pad oxide layer and a mask layer are successively formed. The pad oxide layer, the mask layer and a portion of the substrate are patterned to form a trench. After performing...
07/05/2005
6891244Plug structure having low contact resistance and method of manufacturing
A manufacturing method of a plug structure having low contact resistance includes the following steps. First, a silicon substrate and a BPSG layer covering thereon are provided. The silicon substrate has a dopant area. Next, the BPSG layer is etched to form a contac...
05/10/2005
 
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