|6914442||Method for measuring resistivity of semiconductor wafer|
The present invention is to provide a method for measuring resistivity of a semiconductor wafer by the use of an AC-SPV method even though the wafer is left in a depletion state or a weak inversion state. The present invention is the method for measuring resistivity...
|6589336||Production method for silicon epitaxial wafer and silicon epitaxial wafer|
Performing the post-implantation annealing for recovering crystallinity in a hydrogen atmosphere can successfully suppress the surface roughening on the ion-implanted layers without pre-implantation oxidation. This allows omission of the pre-implantation ...