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| Number | Title | Issue Date |
| 7297181 | Purification and transfilling of ammonia An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillatio... | 11/20/2007 |
| 6899116 | Pressure vessel systems and methods for dispensing liquid chemical compositions Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressur... | 05/31/2005 |
| 6885452 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The sys... | 04/26/2005 |
| 6736154 | Pressure vessel systems and methods for dispensing liquid chemical compositions Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressur... | 05/18/2004 |
| 6493086 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample regi... | 12/10/2002 |
| 6392745 | Method and apparatus for the fast detection of surface characteristics A method and apparatus for quickly detecting the surface characteristics of a surface, such as features, anomalies or contaminants are disclosed. The method and apparatus use heterogeneous condensation of a vapor on a surface and evaporation to reveal the... | 05/21/2002 |
| 6363728 | System and method for controlled delivery of liquefied gases from a bulk source Provided is a novel system and method for delivery of gas from a liquefied state. The system includes (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy ... | 04/02/2002 |
| 6214173 | On-site manufacture of ultra-high-purity nitric acid Provided is a novel on-site system and method for providing ultra-high-purity nitric acid to a point of use. The system includes a source of nitric acid at a concentration greater than 68 wt %; a reflux distillation column having an inlet in communication... | 04/10/2001 |
| 6199384 | System and method for controlled delivery of liquefied gases including control aspects Provided is a novel system for delivery of a gas from a liquefied state. The system includes: (a) a cabinet having a first and second panel disposed therein; (b) at least one compressed liquefied gas cylinder corresponding to each panel disposed in the ca... | 03/13/2001 |
| 6154284 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample regi... | 11/28/2000 |
| 6122931 | System and method for delivery of a vapor phase product to a point of use Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liq... | 09/26/2000 |
| 6076359 | System and method for controlled delivery of liquified gases Provided is a novel system and method for delivery of a gas from a liquified state. The system includes: (a) a compressed liquified gas cylinder having a gas line connected thereto through which the gas is withdrawn; (b) a gas cylinder cabinet in which th... | 06/20/2000 |
| 6032483 | System and method for delivery of a vapor phase product to a point of use Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liq... | 03/07/2000 |
| 5963336 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample regi... | 10/05/1999 |
| 5814741 | Metal sampling method and system for non-hydrolyzable gases Provided is a portable system useful for sampling both particulate and vapor phase metallic impurities from gases that cannot by hydrolyzed. The system comprises a valve for introducing and controlling the exhaust of the gas to be sampled from the system.... | 09/29/1998 |
| 5761911 | System and method for controlled delivery of liquified gases Provided is a novel system and method for delivery of a gas from a liquified state. The system includes: (a) a compressed liquified gas cylinder having a gas line connected thereto through which the gas is withdrawn; (b) a gas cylinder cabinet in which th... | 06/09/1998 |
| 5618996 | Metal sampling method and system for non-hydrolyzable gases Provided is a portable system useful for sampling both particulate and vapor phase metallic impurities from gases that cannot by hydrolyzed. The system comprises valves for introducing and controlling the exhaust of the gas to be sampled from the system. ... | 04/08/1997 |
