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Inventor: Hideo Tadokoro


Address: Nishitama-gun, JP
No. of patents: 1
Last patent issue date: 09/03/1996

NumberTitleIssue Date
5552602Electron microscope
3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at...
09/03/1996
 
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