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Inventor: Daniel J. Ferguson


Address: Marlboro, NY
No. of patents: 3
Last patent issue date: 12/24/1996

NumberTitleIssue Date
5587095Process and apparatus for contamination-free processing of semiconductor parts
This invention relates generally to a process and apparatus for contamination-free processing of semiconductor parts. More specifically, this invention relates to a process and apparatus for contamination-free processing of semiconductor parts in an oven ...
12/24/1996
5550351Process and apparatus for contamination-free processing of semiconductor parts
An apparatus for contamination-free treating semiconductor parts in a furnace. A carrier into which the semiconductor parts are placed has a cover placed over the carrier to form a boat enveloping the parts while the parts are treated in a furnace. The bo...
08/27/1996
5471033Process and apparatus for contamination-free processing of semiconductor parts
This invention relates generally to a process and apparatus for contamination-free processing of semiconductor parts. More specifically, this invention relates to a process and apparatus for contamination-free processing of semiconductor parts in an oven ...
11/28/1995
 
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