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| Number | Title | Issue Date |
| 5523266 | Optical member of synthetic quartz glass for excimer lasers and method for producing same A synthetic quartz glass optical member for an ultraviolet laser, where the quartz glass has a hydroxyl content of 10-100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1×1016 molecules/cm3 or less, a homogeneity ... | 06/04/1996 |
| 5364433 | Optical member of synthetic quartz glass for excimer lasers and method for producing same A synthetic quartz glass optical member for an ultraviolet laser, suitably applicable as a stepper lens of a lithographer using an excimer laser beam and other optical members, wherein the quartz glass has a hydroxyl content of 10 to 100 ppm, a chlorine c... | 11/15/1994 |
