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| Number | Title | Issue Date |
| 7628860 | Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to b... | 12/08/2009 |
| 7615120 | Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to b... | 11/10/2009 |
| 7552015 | Apparatus and method for displaying mass flow controller pressure A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow ... | 06/23/2009 |
| 7474968 | Critical flow based mass flow verifier A flow verifier for verifying measurement by a fluid delivery device under test (DUT) includes a chamber configured to receive a flow of the fluid from the DUT, at least one temperature sensor to provide gas temperature in the chamber, at least one pressure transduc... | 01/06/2009 |
| 7463991 | Mass flow verifier with flow restrictor A flow verifier for verifying measurement of a flow rate of a fluid by a device includes a flow restrictor that renders the flow rate verification substantially insensitive to elements upstream of the flow restrictor. The flow verifier includes a vessel that receive... | 12/09/2008 |
| 7424346 | Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals t... | 09/09/2008 |
| 7174263 | External volume insensitive flow verification A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media conn... | 02/06/2007 |
| 7166187 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and ... | 01/23/2007 |
| 7136767 | Apparatus and method for calibration of mass flow controller A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a rece... | 11/14/2006 |
| 7121139 | Thermal mass flow rate sensor having fixed bypass ratio A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube,... | 10/17/2006 |
| 7120542 | Flow monitoring system A flow monitoring system includes a first temperature-sensitive resistive device, thermally coupled to a first portion of a fluid transfer apparatus, for producing a first temperature-dependant voltage signal representative of the temperature of the fluid within the... | 10/10/2006 |
| 7107834 | Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the p... | 09/19/2006 |
| 7073771 | Porous valve assembly A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber c... | 07/11/2006 |
| 7072743 | Semiconductor manufacturing gas flow divider system and method A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of ... | 07/04/2006 |
| 7007707 | Mass flow ratio system and method A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a d... | 03/07/2006 |
| 7004191 | Apparatus and method for mass flow controller with embedded web server A mass flow controller includes an electronic controller that provides a web server that allows access to the web server through such interworking networks as the Internet. ... | 02/28/2006 |
| 7000463 | Reynolds number correction function for mass flow rate sensor A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube ... | 02/21/2006 |
| 6986359 | System and method for controlling pressure in remote zones A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device... | 01/17/2006 |
| 6948508 | Apparatus and method for self-calibration of mass flow controller A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are ... | 09/27/2005 |
| 6932098 | Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals t... | 08/23/2005 |
| 6918295 | Thermal mass flow rate sensor providing increased rate of heat transfer to gas A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a capillary tube for tapping a portion of the fluid flow from the main conduit at a first location, and returning the port... | 07/19/2005 |
| 6868862 | Apparatus and method for mass flow controller with a plurality of closed loop control code sets A mass flow controller includes an electronic controller for which a plurality of closed loop control codes sets may be uploaded. In a dual processor embodiment, one processor may upload a plurality of codes sets for another, with the selection of codes sets determi... | 03/22/2005 |
| 6868723 | Thermal anemometry mass flow measurement apparatus and method A mass flow measurement apparatus including a flow path defined by a tubular side wall, a probe extending through the side wall into the flow path so that a first portion of the probe is located in the flow path and a second portion of the probe, extends out of the ... | 03/22/2005 |
| 6857323 | Two phase flow sensor using tomography techniques A method and system is presented for accurately measuring the two phase flow rate of a fluid mixture that includes two different phase components. Capacitance tomography measurements are made in order to determine the concentration ratio of the different phase compo... | 02/22/2005 |
| 6813943 | Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement An apparatus for conditioning a gas flow to improve a measurement of rate of pressure change associated with the gas flow includes a measurement chamber having an interior portion characterized by an internal volume, and an inlet port for receiving the gas flow. The... | 11/09/2004 |
| 6810308 | Apparatus and method for mass flow controller with network access to diagnostics A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network in... | 10/26/2004 |
| 6783630 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and ... | 08/31/2004 |
| 6779394 | Apparatus and method for thermal management of a mass flow controller A thermal mass flow controller includes a sensor assembly, a valve assembly, and mass flow controller housing. A thermal ground limits the conductive thermal path between the mass flow controller housing and the sensor assembly and, due to the limited cross-section ... | 08/24/2004 |
| 6766260 | Mass flow ratio system and method A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a d... | 07/20/2004 |
| 6712084 | Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals t... | 03/30/2004 |
| 6668641 | Apparatus and method for thermal dissipation in a thermal mass flow sensor A thermal mass flow controller includes a sensor assembly, a valve assembly, and a mass flow controller housing. A thermally conductive element conducts heat from the valve assembly away from the sensor assembly, thereby reducing uncontrolled contribution... | 12/30/2003 |
| 6610968 | System and method for controlling movement of a workpiece in a thermal processing system A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, m... | 08/26/2003 |
| 6461036 | System and method for determining stray light in a thermal processing system A system and method for determining the stray radiation within a heating chamber of a thermal processing apparatus. The stray radiation is determined by moving a generally unheated wafer vertically through the heating chamber, and measuring with a detecto... | 10/08/2002 |
| 6375348 | System and method for the real time determination of the in situ emissivity and temperature of a workpiece during processing A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the ther... | 04/23/2002 |
| 6183127 | System and method for the real time determination of the in situ emissivity of a workpiece during processing A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the ther... | 02/06/2001 |