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Inventor: Adrian Kiermasz


Address: Bristol, GB
No. of patents: 2
Last patent issue date: 02/22/2011

NumberTitleIssue Date
7892863Measuring apparatus
Measuring apparatus for monitoring the position of the center of mass of a semiconductor wafer is disclosed. The apparatus includes a wafer support (14) with a ledge for supporting an edge of a wafer (2) when it is lifted at a detection point by a prob...
02/22/2011
6242366Methods and apparatus for treating a semiconductor substrate
A liquid short-chain polymer of the general formula Ra Si(OH)b or (R)a SiHb (OH)c is deposited on a substrate, where a+b=4 or a+b+c=4, respectively, a, b and c are integers, R is a carbon-containing g...
06/05/2001
 
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