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Inventor: Adrian KIERMASZ


Address: Bristol, GB
No. of applications: 1
Last application issue date: 05/19/2011

Application No.Application TitleIssue Date
20110119009Measuring Apparatus
Measuring apparatus for monitoring the position of the centre of mass of a semiconductor wafer is disclosed. The apparatus includes a wafer support (14) with a ledge for supporting an edge of a wafer (2) when it is lifted at a detection point by a probe (<...
05/19/2011
 
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