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| Application No. | Application Title | Issue Date |
| 20110273697 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially... | 11/10/2011 |
| 20100245796 | Optical Integrator, Illumination Optical Device, Aligner, and Method for Fabricating Device An optical integrator is able to keep down a light-quantity loss in modified illumination with an illumination optical apparatus. An optical integrator of a wavefront division type according to the present invention has a plurality of refracting surface regions which re... | 09/30/2010 |
| 20100225895 | Illumination optical system, exposure apparatus, and exposure method An illumination optical system and method illuminates an irradiated surface based on linearly polarized light supplied from a light source. The illumination optical system includes a depolarizer which is selectively positioned between a first position in an optical path... | 09/09/2010 |
| 20100149511 | Illumination optical system, exposure apparatus, and exposure method An illumination optical system illuminates an irradiated surface with light supplied from a light source. The illumination optical system includes a diffractive optical element disposed in an optical path of linearly polarized light supplied from the light source. The d... | 06/17/2010 |
| 20090316132 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially... | 12/24/2009 |
| 20090284727 | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located... | 11/19/2009 |
| 20090073414 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially... | 03/19/2009 |
| 20090073441 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially... | 03/19/2009 |
| 20090002664 | OPTICAL INTEGRATOR, ILLUMINATION OPTICAL DEVICE, ALIGNER, AND METHOD FOR FABRICATING DEVICE An optical integrator is able to keep down a light-quantity loss in modified illumination with an illumination optical apparatus. An optical integrator of a wavefront division type according to the present invention has a plurality of refracting surface regions which re... | 01/01/2009 |
| 20080239274 | Illumination optical system, exposure apparatus, and exposure method An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensit... | 10/02/2008 |
| 20080094602 | Illumination optical system, exposure apparatus, and exposure method An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensit... | 04/24/2008 |
| 20080074632 | Illumination optical system, exposure apparatus, and exposure method An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensit... | 03/27/2008 |
| 20080042068 | Exposure apparatus, exposure method, and method for producing device A sensor is used at a substrate level in a lithographic projection apparatus having a projection system with a numeric aperture that is greater than 1 and is configured to project a patterned radiation beam onto a target portion of a substrate The sensor includes a radi... | 02/21/2008 |
| 20060181690 | Exposure apparatus, exposure method, and method for producing device A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to p... | 08/17/2006 |
| 20060170891 | Exposure apparatus, exposure method, and method for producing device A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to p... | 08/03/2006 |
| 20060170901 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially... | 08/03/2006 |
