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Inventor: Norbert Erwin Therenzo Jansen


Address: Eindhoven, NL
No. of applications: 3
Last application issue date: 11/25/2010

Application No.Application TitleIssue Date
20100297282IMPRINT LITHOGRAPHY APPARATUS
An arrangement suitable for use in an imprint lithography apparatus is disclosed. The arrangement includes a support structure arranged to support an imprint template arrangement, a first actuator configured to apply a force to the imprint template arrangement, and a se...
11/25/2010
20100238424Lithographic Apparatus and Device Manufacturing Method
A positioning apparatus includes a first object and a second object; a positioning system configured to position the first and the second objects with respect to each other; and a flexible transportation line that is connected to the first and the second objects, the fl...
09/23/2010
20050050711Method of positioning by means of an actuator having three bridges
Method of positioning a part (43) in a device by means of an actuator (1). The actuator comprises two parts (3, 5) which extend in a main plane and are mutually connected by means of three bridges (7, 9, 11). The bridges can be shortened in r...
03/10/2005
 
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