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| Application No. | Application Title | Issue Date |
| 20080188970 | Methods and Arrangement for Creating Recipes Using Best-Known Methods A method for affecting a creation of a recipe for processing a substrate in a processing system is provided. The method includes providing a best-know method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which a... | 08/07/2008 |
| 20080150138 | Process integration scheme to lower overall dielectric constant in BEoL interconnect structures Back-End of Line (BEoL) interconnect structures, and methods for their manufacture, are provided. The structures are characterized by narrower conductive lines and reduced overall dielectric constant values. Conformal diffusion barrier layers, and selectively formed cap... | 06/26/2008 |
| 20080079918 | AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the firs... | 04/03/2008 |
| 20060271325 | Smart component-based management techniques in a substrate processing system A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality ... | 11/30/2006 |
| 20060257750 | Reticle alignment and overlay for multiple reticle process A method for generating a plurality of reticle layouts is provided. A feature layout with a feature layout pitch is received. A plurality of reticle layouts is generated from the feature layout where each reticle layout of the plurality of reticle layouts has a reticle ... | 11/16/2006 |
| 20060259886 | Computer readable mask shrink control processor An apparatus comprising computer readable media is provided. The computer readable media comprises computer readable code for receiving a feature layout and computer readable code for applying shrink correction on the feature layout. The computer readable code for apply... | 11/16/2006 |
| 20060047458 | Smart component-based management techniques in a substrate processing system A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality ... | 03/02/2006 |
