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Inventor: Harry Marth


Address: Waldbronn, DE
No. of applications: 1
Last application issue date: 01/21/2010

Application No.Application TitleIssue Date
20100013354ADJUSTING DEVICE WITH HIGH POSITION RESOLUTION, EVEN IN THE NANO-OR SUBNANOMETER RANGE
The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are u... 		01/21/2010
 
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