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| Application No. | Application Title | Issue Date |
| 20120107503 | Smoothing Agents to Enhance Nucleation Density in Thin Film Chemical Vapor Deposition The present invention provides methods for making structures, including nanosized and microsized thin film structures that exhibit a high degree of smoothness useful for applications in microelectronics. Deposition processing of the invention utilize smoothing agents ca... | 05/03/2012 |
| 20110200762 | Surface Preparation for Thin Film Growth by Enhanced Nucleation Various processes and related systems are provided for making structures on substrate surfaces. Disclosed are methods of making a structure supported by a substrate by providing a substrate having a receiving surface and exposing at least a portion of the receiving surf... | 08/18/2011 |
| 20100048029 | Surface Preparation for Thin Film Growth by Enhanced Nucleation Various processes and related systems are provided for making structures on substrate surfaces. Disclosed are methods of making a structure supported by a substrate by providing a substrate having a receiving surface and exposing at least a portion of the receiving surf... | 02/25/2010 |
