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Inventor: Gregg Higashi


Address: San Jose, CA
No. of applications: 21
Last application issue date: 05/03/2012

Application No.Application TitleIssue Date
20120106935HEATING LAMP SYSTEM AND METHODS THEREOF
Embodiments of the invention generally relate to apparatuses and methods for chemical vapor deposition (CVD). In one embodiment, a heating lamp assembly for a CVD reactor system is provided which includes a lamp housing disposed on an upper surface of a support base and...
05/03/2012
20120067286VAPOR DEPOSITION REACTOR SYSTEM AND METHODS THEREOF
Embodiments of the invention generally relate to apparatuses and methods for chemical vapor deposition (CVD) processes. In one embodiment, a CVD reactor has a reactor lid assembly disposed on a reactor body and containing a first showerhead assembly, an isolator assembl...
03/22/2012
20120067282REACTOR LID ASSEMBLY FOR VAPOR DEPOSITION
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a reactor lid assembly for vapor deposition is provided which includes a first showerhead assembly and an isolator assembly disposed next to ea...
03/22/2012
20110308463CHEMICAL VAPOR DEPOSITION REACTOR WITH ISOLATED SEQUENTIAL PROCESSING ZONES
A chemical vapor deposition reactor and system has a housing, a substrate transport apparatus and a plurality of fixed processing zones. The processing zones include one or more chemical vapor deposition zones, each having an independent reactant gas supply. Each chemic...
12/22/2011
20100229793SHOWERHEAD FOR VAPOR DEPOSITION
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a showerhead assembly is provided which includes a body having a centralized channel extending through upper and lower portions of the body and...
09/16/2010
20100212591REACTOR LID ASSEMBLY FOR VAPOR DEPOSITION
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a reactor lid assembly for vapor deposition is provided which includes a first showerhead assembly and an isolator assembly disposed next to ea...
08/26/2010
20100209620METHOD FOR VAPOR DEPOSITION
Embodiments of the invention generally relate to methods for chemical vapor deposition (CVD) processes. In one embodiment, a method for processing a wafer within a vapor deposition reactor is provided which includes heating at least one wafer disposed on a wafer carrier...
08/19/2010
20100209626METHODS FOR HEATING WITH LAMPS
Embodiments of the invention generally relate to methods for chemical vapor deposition (CVD) processes. In one embodiment, a method for heating a substrate or a substrate susceptor within a vapor deposition reactor system includes exposing a lower surface of a substrate...
08/19/2010
20100209082HEATING LAMP SYSTEM
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a heating lamp assembly for a vapor deposition reactor system is provided which includes a lamp housing disposed on an upper surface of a suppo...
08/19/2010
20100206229VAPOR DEPOSITION REACTOR SYSTEM
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a CVD reactor is provided which includes a reactor lid assembly disposed on a reactor body and containing a first showerhead assembly, an isola...
08/19/2010
20100206235WAFER CARRIER TRACK
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a wafer carrier track for levitating and traversing a wafer carrier within a vapor deposition reactor system is provided which includes upper a...
08/19/2010
20100132780PHOTOVOLTAIC DEVICE
Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) unit, according to embodiments of the invention, may have a v...
06/03/2010
20100126571PHOTOVOLTAIC DEVICE WITH INCREASED LIGHT TRAPPING
Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) device may incorporate front side and/or back side light trap...
05/27/2010
20100126572PHOTOVOLTAIC DEVICE WITH BACK SIDE CONTACTS
Methods and apparatus for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells are provided. A photovoltaic (PV) device generally includes a window layer; an absorber layer d...
05/27/2010
20100126552INTEGRATION OF A PHOTOVOLTAIC DEVICE
Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) unit may have all electrical contacts positioned on the back ...
05/27/2010
20100126570THIN ABSORBER LAYER OF A PHOTOVOLTAIC DEVICE
Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. In one embodiment of a photovoltaic (PV) device, the PV device generally includes...
05/27/2010
20090321881EPITAXIAL LIFT OFF STACK HAVING A PRE-CURVED HANDLE AND METHODS THEREOF
Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a ...
12/31/2009
20090321885EPITAXIAL LIFT OFF STACK HAVING A UNIVERSALLY SHRUNK HANDLE AND METHODS THEREOF
Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a ...
12/31/2009
20090324379METHODS AND APPARATUS FOR A CHEMICAL VAPOR DEPOSITION REACTOR
Embodiments of the invention generally relate to a levitating substrate carrier or support. In one embodiment, a substrate carrier for supporting and carrying at least one substrate or wafer is provided which includes a substrate carrier body containing an upper surface...
12/31/2009
20090325367METHODS AND APPARATUS FOR A CHEMICAL VAPOR DEPOSITION REACTOR
Embodiments of the invention generally relate to a chemical vapor deposition system and related method of use. In one embodiment, the system includes a reactor lid assembly having a body, a track assembly having a body and a guide path located along the body, and a heat...
12/31/2009
20050260347Formation of a silicon oxynitride layer on a high-k dielectric material
In one embodiment, a method for depositing a capping layer on a dielectric layer in a process chamber is provided which includes depositing the dielectric layer on a substrate surface, depositing a silicon-containing layer by an ALD process, comprising alternately pulsi...
11/24/2005
 
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