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| Application No. | Application Title | Issue Date |
| 20090039289 | Positioning device for positioning an aperture plate in an Ion Beam A positioning device for positioning an aperture plate in an ion beam of an ion implantation system has two fixture parts that can be moved relative to each other by means of at least one positioning drive, of which the one fixture part can be connected or is connected ... | 02/12/2009 |
