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Inventor: David R. Atwell


Address: Boise, ID,
No. of applications: 1
Last application issue date: 02/05/2009

Application No.Application TitleIssue Date
20090035465CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED METHODS
System and method for operating a material deposition system are disclosed. In one embodiment, the method can include periodically injecting a precursor into a vaporizer through an injector at the vaporizer, vaporizing the precursor in the vaporizer and supplying the va...
02/05/2009
 
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