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| Application No. | Application Title | Issue Date |
| 20100221915 | METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamb... | 09/02/2010 |
| 20080089774 | A METHOD AND APPARATUS FOR SEMCONDUCTOR PROCESSING A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamb... | 04/17/2008 |
| 20080073031 | METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamb... | 03/27/2008 |
| 20050194096 | Method and apparatus for semiconductor processing A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamb... | 09/08/2005 |
