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| Application No. | Application Title | Issue Date |
| 20100332012 | ARRANGEMENT FOR IDENTIFYING UNCONTROLLED EVENTS AT THE PROCESS MODULE LEVEL AND METHODS THEREOF A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor... | 12/30/2010 |
| 20100325084 | COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality ... | 12/23/2010 |
| 20100152879 | PROCESSING INFORMATION MANAGEMENT SYSTEM IN A PLASMA PROCESSING TOOL A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a proces... | 06/17/2010 |
| 20100125360 | METHODS FOR PERFORMING DATA MANAGEMENT FOR A RECIPE-AND-COMPONENT CONTROL MODULE A computer-implemented method for performing data management in a plasma processing system is provided. The method includes providing a recipe-and component control module (RACCM). The RACCM is a server that includes a plurality of intelligent agents, which are configur... | 05/20/2010 |
| 20080188970 | Methods and Arrangement for Creating Recipes Using Best-Known Methods A method for affecting a creation of a recipe for processing a substrate in a processing system is provided. The method includes providing a best-know method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which a... | 08/07/2008 |
| 20080147668 | PRIMARY SERVER ARCHITECTURAL NETWORKING ARRANGEMENT AND METHODS THEREFOR An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for ... | 06/19/2008 |
| 20080079918 | AUTOMATIC DYNAMIC BASELINE CREATION AND ADJUSTMENT In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the firs... | 04/03/2008 |
| 20080082579 | DYNAMIC COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first d... | 04/03/2008 |
| 20080082653 | TARGETED DATA COLLECTION ARCHITECTURE A targeted data collection system configured to collect processing data in a plasma processing system is provided. The system includes a data collection host and a plurality of plasma processing components having a plurality of sensors such that each of the plurality of... | 04/03/2008 |
| 20060206223 | Secure universal configuration software for cluster tools A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating ... | 09/14/2006 |
| 20060194351 | Methods and apparatus for configuring plasma cluster tools A method for configuring a specific plasma cluster tool having a plurality of modules. The method includes providing a set of module option definition files, the set of module option definition files containing generic configuration definitions for generic plasma cluste... | 08/31/2006 |
