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Inventor: Cheol-soon Kim


Address: Yongin, KR
No. of patents: 1
Last patent issue date: 02/04/2003

NumberTitleIssue Date
6515489Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing
The apparatus senses the positions of X- and Y- axes of the stage by applying an excitation signal having a phase difference to a stator of each axis of the XY-stage and then time-division detecting changes in capacitance from a moving plate. The apparatu...
02/04/2003
 
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