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Inventor: Cheol-Se Kim

Address: Taegu, KR
No. of patents: 1
Last patent issue date: 05/28/2002

Number	Title	Issue Date
6395652	Method of manufacturing thin film transistor A method of manufacturing a thin film transistor, includes preparing a process chamber having a stage, providing a substrate on the stage of the process chamber, injecting a first mixed gas of NH3, N2 and SiH4 into the pro...	05/28/2002