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| Application No. | Application Title | Issue Date |
| 20100229793 | SHOWERHEAD FOR VAPOR DEPOSITION Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a showerhead assembly is provided which includes a body having a centralized channel extending through upper and lower portions of the body and... | 09/16/2010 |
| 20100219509 | TILED SUBSTRATES FOR DEPOSITION AND EPITAXIAL LIFT OFF PROCESSES Embodiments of the invention generally relate to epitaxial lift off (ELO) films and methods for producing such films. Embodiments provide a method to simultaneously and separately grow a plurality of ELO films or stacks on a common support substrate which is tiled with ... | 09/02/2010 |
| 20100212591 | REACTOR LID ASSEMBLY FOR VAPOR DEPOSITION Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a reactor lid assembly for vapor deposition is provided which includes a first showerhead assembly and an isolator assembly disposed next to ea... | 08/26/2010 |
| 20100209082 | HEATING LAMP SYSTEM Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a heating lamp assembly for a vapor deposition reactor system is provided which includes a lamp housing disposed on an upper surface of a suppo... | 08/19/2010 |
| 20100206229 | VAPOR DEPOSITION REACTOR SYSTEM Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a CVD reactor is provided which includes a reactor lid assembly disposed on a reactor body and containing a first showerhead assembly, an isola... | 08/19/2010 |
| 20100206235 | WAFER CARRIER TRACK Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a wafer carrier track for levitating and traversing a wafer carrier within a vapor deposition reactor system is provided which includes upper a... | 08/19/2010 |
| 20100209626 | METHODS FOR HEATING WITH LAMPS Embodiments of the invention generally relate to methods for chemical vapor deposition (CVD) processes. In one embodiment, a method for heating a substrate or a substrate susceptor within a vapor deposition reactor system includes exposing a lower surface of a substrate... | 08/19/2010 |
| 20100209620 | METHOD FOR VAPOR DEPOSITION Embodiments of the invention generally relate to methods for chemical vapor deposition (CVD) processes. In one embodiment, a method for processing a wafer within a vapor deposition reactor is provided which includes heating at least one wafer disposed on a wafer carrier... | 08/19/2010 |
| 20100151689 | TAPE-BASED EPITAXIAL LIFT OFF APPARATUSES AND METHODS Embodiments of the invention generally relate to apparatuses and methods for producing epitaxial thin films and devices by epitaxial lift off (ELO) processes. In one embodiment, a method for forming thin film devices during an ELO process is provided which includes coup... | 06/17/2010 |
| 20100147370 | MULTIPLE STACK DEPOSITION FOR EPITAXIAL LIFT OFF Embodiments of the invention are provided for a thin film stack containing a plurality of epitaxial stacks disposed on a substrate and a method for forming such a thin film stack. In one embodiment, the epitaxial stack contains a first sacrificial layer disposed over th... | 06/17/2010 |
| 20100132780 | PHOTOVOLTAIC DEVICE Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) unit, according to embodiments of the invention, may have a v... | 06/03/2010 |
| 20100126572 | PHOTOVOLTAIC DEVICE WITH BACK SIDE CONTACTS Methods and apparatus for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells are provided. A photovoltaic (PV) device generally includes a window layer; an absorber layer d... | 05/27/2010 |
| 20100126571 | PHOTOVOLTAIC DEVICE WITH INCREASED LIGHT TRAPPING Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) device may incorporate front side and/or back side light trap... | 05/27/2010 |
| 20100126570 | THIN ABSORBER LAYER OF A PHOTOVOLTAIC DEVICE Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. In one embodiment of a photovoltaic (PV) device, the PV device generally includes... | 05/27/2010 |
| 20100126552 | INTEGRATION OF A PHOTOVOLTAIC DEVICE Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) unit may have all electrical contacts positioned on the back ... | 05/27/2010 |
| 20100092668 | Concentric Showerhead For Vapor Deposition Embodiments of the invention generally relate to a concentric gas manifold assembly used in deposition reactor or system during a vapor deposition process. In one embodiment, the manifold assembly has an upper section coupled to a middle section coupled to a lower secti... | 04/15/2010 |
| 20100001316 | EPITAXIAL LIFT OFF STACK HAVING A NON-UNIFORM HANDLE AND METHODS THEREOF Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming a thin film material during an epitaxial lift off process is provided which includes... | 01/07/2010 |
| 20090321885 | EPITAXIAL LIFT OFF STACK HAVING A UNIVERSALLY SHRUNK HANDLE AND METHODS THEREOF Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a ... | 12/31/2009 |
| 20090325367 | METHODS AND APPARATUS FOR A CHEMICAL VAPOR DEPOSITION REACTOR Embodiments of the invention generally relate to a chemical vapor deposition system and related method of use. In one embodiment, the system includes a reactor lid assembly having a body, a track assembly having a body and a guide path located along the body, and a heat... | 12/31/2009 |
| 20090324379 | METHODS AND APPARATUS FOR A CHEMICAL VAPOR DEPOSITION REACTOR Embodiments of the invention generally relate to a levitating substrate carrier or support. In one embodiment, a substrate carrier for supporting and carrying at least one substrate or wafer is provided which includes a substrate carrier body containing an upper surface... | 12/31/2009 |
| 20090321886 | EPITAXIAL LIFT OFF STACK HAVING A UNIDIRECTIONALLY SHRUNK HANDLE AND METHODS THEREOF Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a ... | 12/31/2009 |
| 20090321881 | EPITAXIAL LIFT OFF STACK HAVING A PRE-CURVED HANDLE AND METHODS THEREOF Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a ... | 12/31/2009 |
