Inventor: Ali Shajii

Address: Canton, MA
No. of applications: 26
Last application issue date: 01/05/2012

Application No.	Application Title	Issue Date
20120003748	Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequen...	01/05/2012
20100324743	APPARATUS AND METHOD FOR PRESSURE FLUCTUATION INSENSITIVE MASS FLOW CONTROL A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an...	12/23/2010
20100231296	Radio Frequency Power Delivery System A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring vol...	09/16/2010
20100219757	Method and Apparatus of Providing Power to Ignite and Sustain a Plasma in a Reactive Gas Generator Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition ci...	09/02/2010
20090320677	PARTICLE TRAP FOR A PLASMA SOURCE A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel forme...	12/31/2009
20080091306	APPARATUS AND METHOD FOR PRESSURE FLUCTUATION INSENSITIVE MASS FLOW CONTROL A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an...	04/17/2008
20070139122	Radio Frequency Power Delivery System A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring vol...	06/21/2007
20070039550	Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be de...	02/22/2007
20070039549	Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be de...	02/22/2007
20070042508	Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be de...	02/22/2007
20060217900	Mass flow verifier with flow restrictor A flow verifier for verifying measurement of a flow rate of a fluid by a device includes a flow restrictor that renders the flow rate verification substantially insensitive to elements upstream of the flow restrictor. The flow verifier includes a vessel that receives a ...	09/28/2006
20060214127	Parallel plate valve assembly A valve assembly including a first plate having a first surface defining a port, a second plate received over the first plate such that the port of the first plate is substantially closed by a first surface of the second plate, wherein the second plate is movable away f...	09/28/2006
20060217903	External volume insensitive flow verification A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media connecti...	09/28/2006
20060207503	Vaporizer and method of vaporizing a liquid for thin film delivery A vaporizer including an inlet for liquid and an outlet for gas, a gas valve controlling gas flow to the outlet of the vaporizer, and means for heating liquid flowing between the liquid inlet and the gas valve. The vaporizer also includes means for increasing a heat tra...	09/21/2006
20060173642	Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an...	08/03/2006
20060169327	Pressure regulation in remote zones A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosur...	08/03/2006
20060101907	Thermal mass flow rate sensor having fixed bypass ratio A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and...	05/18/2006
20060101908	Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the porti...	05/18/2006
20060060139	Precursor gas delivery with carrier gas mixing A system and method are described that control the amount of precursor that is delivered to a process chamber by precisely measuring the mole fraction of the gas mixture being delivered. A gas delivery system includes a delivery chamber, a precursor inlet valve, a carri...	03/23/2006
20050223979	Pulsed mass flow delivery system and method A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be de...	10/13/2005
20050218361	POROUS VALVE ASSEMBLY A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber coaxi...	10/06/2005
20050222782	Flow monitoring system A flow monitoring system includes a first temperature-sensitive resistive device, thermally coupled to a first portion of a fluid transfer apparatus, for producing a first temperature-dependant voltage signal representative of the temperature of the fluid within the fir...	10/06/2005
20050217346	Flow measurement calibration A flow measurement calibration system and method is presented that actively regulates the pressure of the fluid being tested. A piston is slidably mounted to an inner wall of a chamber, which has a fluid inlet port for receiving an inflow of fluid into the interior of t...	10/06/2005
20050199287	SYSTEM AND METHOD FOR CONTROLLING PRESSURE IN REMOTE ZONES A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device for...	09/15/2005
20050199342	Semiconductor manufacturing gas flow divider system and method A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow...	09/15/2005
20050026447	Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and meth...	02/03/2005

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Inventor: Ali Shajii