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"During my service in the United States Congress, I took the initiative in creating the Internet."
Al Gore ; The basis for the later misquote by US Republicans that Gore had "invented" the Internet. Gore was the leading political champion of the modern-day Internet.
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| Application No. | Application Title | Issue Date |
| 20120130520 | FACTORY LEVEL PROCESS AND FINAL PRODUCT PERFORMANCE CONTROL SYSTEM A factory control server stores module configuration data for modules. The modules include processes for producing a final product and have corresponding module requirements. The factory control server analyzes in real-time actual product output data that is generated b... | 05/24/2012 |
| 20120053721 | FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDING MANIPULATION OF REMOVAL RATE PROFILES A method of controlling surface non-uniformity of a wafer in a polishing operation includes (a) providing a model for a wafer polishing that defines a plurality of regions on a wafer and identifies a wafer material removal rate in a polishing step of a polishing process... | 03/01/2012 |
| 20110060443 | SCHEDULING MODELING SYSTEM FOR ADAPTIVE, AUTOMATED DATA COLLECTION AND PERFORMANCE ANALYSIS OF MANUFACTURING SYSTEM FOR OPTIMAL SCHEDULING A scheduler system obtains a basic model of a manufacturing process for the production of one or more products. The basic model is based on a first set of data collected at a point in time from a plurality of tools used to manufacture the one or more products. The syste... | 03/10/2011 |
| 20080276137 | Graphical user interface for presenting multivariate fault contributions Recipe steps of a manufacturing process run that generated a fault are displayed in a current view of a user interface, the recipe steps being displayed in association with a first axis. At least one of measured parameters or calculated parameters of the manufacturing p... | 11/06/2008 |
| 20080276128 | Metrics independent and recipe independent fault classes A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fau... | 11/06/2008 |
| 20080276136 | Graphical user interface for presenting multivariate fault contributions Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The u... | 11/06/2008 |
| 20080177408 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. The method includes the steps of identifying one or more input parameters that cause a change in output characteristics, defining global nodes using estimated maximum a... | 07/24/2008 |
| 20080125898 | Ranged fault signatures for fault diagnosis Process data is analyzed, the process data having been generated during a manufacturing process to detect a fault. One or more process variables of the manufacturing process that contributed to the fault are determined. A relative contribution of each of the one or more... | 05/29/2008 |
| 20080021571 | Method, system and medium for controlling manufacture process having multivariate input parameters A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes calculating a set of predicted output values, and obtaining a prediction model based ... | 01/24/2008 |
| 20080015814 | Adaptive multivariate fault detection A method and apparatus for detecting faults. A set of data samples is received, the set of data samples including multiple process variables. One or more multivariate statistical models are adapted, wherein adapting includes applying a change to at least one univariate ... | 01/17/2008 |
| 20080015726 | Ranged fault signatures for fault diagnosis A method and apparatus for diagnosing faults. A fault is detected. One or more process variables that contributed to the fault are determined. A relative contribution of each of the one or more process variables is determined. A determination is made as to which fault s... | 01/17/2008 |
| 20070169694 | Feedback control of sub-atmospheric chemical vapor deposition processes A method of film deposition in a sub-atmospheric chemical vapor deposition (CVD) process includes (a) providing a model for sub-atmospheric CVD deposition of a film that identifies one or more film properties of the film and at least one deposition model variable that c... | 07/26/2007 |
| 20070102116 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles A method of controlling surface non-uniformity of a wafer in a polishing operation includes (a) providing a model for a wafer polishing that defines a plurality of regions on a wafer and identifies a wafer material removal rate in a polishing step of a polishing process... | 05/10/2007 |
| 20050171626 | System, method, and medium for monitoring performance of an advanced process control system A method for monitoring performance of an advanced process control system for at least one process output includes calculating a variance of a prediction error for a processing performance and/or a probability for violating specification limits of the processing perform... | 08/04/2005 |
