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| Number | Title | Issue Date |
| 5807443 | Sputtering titanium target assembly and producing method thereof A cold-worked titanium material subjected to isostatic material and a backing plate are brought into contact with each other and subsequently hot-pressing. By such working the titanium material and the backing plate are bonded with each other by mutual di... | 09/15/1998 |
| 5489367 | Target for reactive sputtering and film-forming method using the target A target for use in reactive sputtering for forming a film by a reaction with nitrogen, which is a target being composed substantially of titanium and nitrogen and having a nitrogen/titanium atomic ratio, N/Ti, of 0.20 to 0.95, and is used for forming a f... | 02/06/1996 |
| 5320729 | Sputtering target Disclosed herein is a sputtering target with which a high resistivity thin film consisting of chromium, silicon and oxygen can be produced economically and stably for a long time. Also disclosed is a process for producing the sputtering target by selectin... | 06/14/1994 |
| 5306569 | Titanium-tungsten target material and manufacturing method thereof A titanium-tungsten target material capable of limiting the amount of particles generated during sputtering and a method of manufacturing this titanium-tungsten material. The titanium-tungsten target material has a titanium-tungsten alloy phase which occu... | 04/26/1994 |
| 5298338 | Titanium-tungsten target material and manufacturing method thereof A titanium-tungsten target material used to form, by sputtering, a barrier metal or the like for use in semiconductor devices. The titanium-tungsten target material is substantially composed of tungsten particles and a titanium-tungsten alloy phase surrou... | 03/29/1994 |
| 5160534 | Titanium-tungsten target material for sputtering and manufacturing method therefor Ti-W target material for sputtering includes a structure composed of a W phase, a Ti phase, and a Ti-W alloy phase of which 20% or more consist of the area ratio of a micro structure covering the cross section of the Ti-W target material. The Wi-W target ... | 11/03/1992 |
