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| 6773614 | Method of patterning conductive films |
| 6750152 | Method and apparatus for electrically testing and characterizing ... |
| 6734104 | Method of manufacturing a semiconductor device and a semiconducto... |
| 6726848 | Apparatus and method for single substrate processing |
| 6727186 | Method for lateral etching with holes for making semiconductor de... |
| 6713401 | Method for manufacturing semiconductor device |
| 6706203 | Adjustable nanopore, nanotome, and nanotweezer |
| 6706204 | Method of fabricating and a device that includes nanosize pores h... |
| 6693045 | High density wafer production method |
| 6693034 | Deadhesion method and mechanism for wafer processing |
| 6686284 | Chemical mechanical polisher equipped with chilled retaining ring... |
| 6683003 | Global planarization method and apparatus |
| 6683009 | Method for local etching |
| 6683004 | Method of manufacturing a semiconductor device, and semiconductor... |
| 6679998 | Method for patterning high density field emitter tips |
| 6677247 | Method of increasing the etch selectivity of a contact sidewall t... |
| 6677248 | Coaxial type signal line and manufacturing method thereof |
| 6677239 | Methods and compositions for chemical mechanical polishing |
| 6670279 | Method of forming shallow trench isolation with rounded corners a... |
| 6667238 | Polishing method and apparatus |
| 6666979 | Dry etch release of MEMS structures |
| 6666915 | Method for the preparation of an epitaxial silicon wafer with int... |
| 6666986 | Supercritical etching compositions and method of using same |
| 6667245 | CMOS-compatible MEM switches and method of making |
| 6663784 | Method for producing three-dimensional structures by means of an ... |
| 6663785 | Broad spectrum emitter array and methods for fabrication thereof |
| 6663956 | Antistatic coating and coated film |
| 6660651 | Adjustable wafer stage, and a method and system for performing pr... |
| 6660647 | Method for processing surface of sample |
| 6660650 | Selective aluminum plug formation and etchback process |
| 6660177 | Apparatus and method for reactive atom plasma processing for mate... |
| 6656029 | Semiconductor device incorporating hemispherical solid immersion ... |
| 6656369 | Method for fabricating a scanning probe microscope probe |
| 6652708 | Methods and apparatus for conditioning and temperature control of... |
| 6649073 | Method for compensating for nonuniform etch profiles |
| 6649082 | Harm-removing agent and method for rendering halogen-containing g... |
| 6645389 | Method of demetallizing a web in an etchant bath and web suitable... |
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