| Patent No. | Patent Title: |
| 7460225 | Miniaturized source devices for optical and mass spectrometry |
| 7450239 | Optical pulse evaluation device and in-service optical pulse eval... |
| 7450240 | Laser device coupled to a cavity by optical feedback for detectin... |
| 7446878 | Method and apparatus for improvement of spectrometer stability, a... |
| 7446882 | Interferometer for determining characteristics of an object surfa... |
| 7443513 | Apparatus for optical measurement of an object |
| 7440113 | Littrow interferometer |
| 7433052 | Systems and methods for tilt and range measurement |
| 7433042 | Spatially corrected full-cubed hyperspectral imager |
| 7428059 | Measurement method and apparatus, exposure apparatus, and device ... |
| 7428055 | Interferometer-based real time early fouling detection system and... |
| 7428054 | Micro-optical sensor system for pressure, acceleration, and press... |
| 7428053 | Common path frequency domain optical coherence reflectometry/tomo... |
| 7426040 | Chip-scale optical spectrum analyzers with enhanced resolution |
| 7426036 | Common path frequency domain optical coherence reflectometer and ... |
| 7426021 | Interferometric optical analyzer and method for measuring the lin... |
| 7423765 | Optical system of a microlithographic projection exposure apparat... |
| 7423279 | Systems and methods that detect changes in incident optical radia... |
| 7412175 | Interferometric polarization control |
| 7405830 | Vibration-insensitive interferometer |
| 7405833 | Method for calibration and removal of wavefront errors |
| 7403289 | Interferometry method for ellipsometry, reflectometry, and scatte... |
| 7397558 | Ordered array of nanoparticles for efficient nanoenhanced Raman s... |
| 7394548 | Heterodyne laser interferometer using heterogenous mode helium-ne... |
| 7391521 | Position detection apparatus and method |
| 7388672 | High efficiency balanced detection interferometer |
| 7385707 | Surface profiling apparatus |
| 7382470 | Interferometric measuring device |
| 7379187 | Detector configuration for interferometric distance measurement |
| 7375825 | Light intensity ratio adjustment filter for an interferometer, in... |
| 7375821 | Profilometry through dispersive medium using collimated light wit... |
| 7369227 | Imaging fluorescence signals using telecentricity |
| 7365852 | Methods and systems for selecting pathlength in absorbance measur... |
| 7365856 | Method of motion correction in optical coherence tomography imagi... |
| 7362445 | Active control and detection of two nearly orthogonal polarizatio... |
| 7362446 | Position measurement unit, measurement system and lithographic ap... |
| 7355719 | Interferometer for measuring perpendicular translations |
| 7355714 | Reconfigurable MEMS fabry-perot tunable matrix filter systems and... |
| 7352471 | Embedded interferometric fiber optic gyroscope systems and method... |
| 7349077 | Method and apparatus for measuring the polarization mode dispersi... |