| Patent No. | Patent Title: |
| 7083879 | Phase conflict resolution for photolithographic masks |
| 7026081 | Optical proximity correction method utilizing phase-edges as sub-... |
| 6924071 | Photomask and method for reducing exposure times of high density ... |
| 6924083 | Mask layout and exposing method for reducing diffraction effects ... |
| 6921613 | Electrostatic pellicle system for a mask |
| 6919148 | Member for a mask film, process for producing a mask film using t... |
| 6919150 | Structures useful in electron beam lithography |
| 6913857 | Exposure mask, method for manufacturing the mask, and exposure me... |
| 6913859 | Mask for differential curing and process for making same |
| 6911283 | Method and apparatus for coupling a pellicle to a photomask using... |
| 6911301 | Methods of forming aligned structures with radiation-sensitive ma... |
| 6908716 | Disposable hard mask for photomask plasma etching |
| 6893786 | Field correction of overlay error |
| 6887625 | Assist features for use in lithographic projection |
| 6884549 | Method for photographic recording of at least a linear and/or non... |
| 6869733 | Pellicle with anti-static/dissipative material coating to prevent... |
| 6869751 | Method of manufacturing metal electrode |
| 6869738 | Mask pattern correction method |
| 6866971 | Full phase shifting mask in damascene process |
| 6861182 | Tri-tone attenuated phase shift trim mask for double exposure alt... |
| 6861179 | Charge effect and electrostatic damage prevention method on photo... |
| 6858352 | Printed circuit fabrication |
| 6855485 | Pattern forming method and apparatus for fabricating semiconducto... |
| 6835505 | Mask for projection photolithography at or below about 160 nm and... |
| 6794095 | Method of fabricating a microstructure and photolithography trimm... |
| 6787270 | Photo mask for patterning a lightning rod |
| 6780568 | Phase-shift photomask for patterning high density features |
| 6777167 | Method of producing an etch-resistant polymer structure using ele... |
| 6773871 | Method of machining glass |
| 6773854 | Method of producing a perforated mask for particle radiation |
| 6770403 | Mask for a photolithography process and method of fabricating the... |
| 6767675 | Mask and method of manufacturing the same |
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing appara... |
| 6762001 | Method of fabricating an exposure mask for semiconductor manufact... |
| 6756164 | Exposure mask with repaired dummy structure and method of repairi... |
| 6756158 | Thermal generation of mask pattern |
| 6753131 | Transparent elastomeric, contact-mode photolithography mask, sens... |
| 6749974 | Disposable hard mask for photomask plasma etching |
| 6749968 | Method for fabricating a thin-membrane stencil mask and method fo... |
| 6746805 | Methods for fabricating lithography apparatus |
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