| Patent No. | Patent Title: |
| 7267924 | Top anti-reflective coating polymer, its preparation method and t... |
| 7261997 | Spin bowl compatible polyamic acids/imides as wet developable pol... |
| 7258962 | Positive-tone radiation-sensitive resin composition |
| 7252925 | Nitrogen-containing organic compound, resist composition and patt... |
| 7247419 | Nanocomposite photosensitive composition and use thereof |
| 7244542 | Resins and photoresist compositions comprising same |
| 7226721 | Underlayer coating forming composition for lithography containing... |
| 7208261 | Polymers, processes for polymer synthesis and photoresist composi... |
| 7205090 | Chemical amplification type positive resist composition |
| 7202016 | Radiation-sensitive resin composition |
| 7202015 | Positive photoresist composition and pattern making method using ... |
| 7186495 | (Meth) acrylate derivative, polymer and photoresist composition h... |
| 7183037 | Antireflective coatings with increased etch rates |
| 7179580 | Radiation sensitive material and method for forming pattern |
| 7169532 | Chemically amplified positive photoresist composition for thick f... |
| 7157208 | Positive resist composition and pattern forming method using the ... |
| 7148265 | Functional polymer |
| 7144675 | Radiation-sensitive resin composition |
| 7138217 | Positive resist composition |
| 7125642 | Sulfonates, polymers, resist compositions and patterning process |
| 7125641 | Polymers, resist compositions and patterning process |
| 7115690 | Fluorine-containing polymer, resist composition prepared from sam... |
| 7112397 | Image forming composition and photosensitive lithographic plate u... |
| 7108952 | Photopolymerizable composition |
| 7084227 | Photosensitive polymer and chemically amplified photoresist compo... |
| 7078444 | Ionic photoacid generators with segmented hydrocarbonfluorocarbon... |
| 7060775 | Polymer compound, resist material and pattern formation method |
| 7052826 | Monitoring method, process and system for photoresist regeneratio... |
| 7033735 | Water soluble negative tone photoresist |
| 7033732 | Method of preparing anti-reflective coating polymer and anti-refl... |
| 7029825 | Photosensitive resin compositive for printing plate precursor cap... |
| 7022459 | Photosensitive composition |
| 7022458 | Photoresist polymer and photoresist composition containing the sa... |
| 7022454 | Monomers, polymers, methods of synthesis thereof and photoresist ... |
| 7018714 | Near-infrared absorption film |
| 7008752 | Photosensitive resin composition and use of the same |
| 7001707 | Resist compositions and patterning process |
| 6991888 | Photoresist composition for deep ultraviolet lithography comprisi... |
| 6962769 | Anti-reflective coating composition with improved spin bowl compa... |
| 6946233 | Polymer, resist material and patterning method |
Did You Know... 
PatentStorm News
