| Patent No. | Patent Title: |
| 6187688 | Pattern formation method |
| 6180020 | Polishing method and apparatus |
| 6180018 | Ink jet printing head, manufacturing method therefor, and ink jet... |
| 6171974 | High selectivity oxide etch process for integrated circuit struct... |
| 6136711 | Polishing composition including an inhibitor of tungsten etching |
| 6120640 | Boron carbide parts and coatings in a plasma reactor |
| 6112695 | Apparatus for plasma deposition of a thin film onto the interior ... |
| 6113699 | Purging gas control structure for CVD chamber |
| 6110289 | Rapid thermal processing barrel reactor for processing substrates |
| 6106622 | Forming optical structures on receivers |
| 6099687 | Etching system |
| 6089183 | Dry etching method, chemical vapor deposition method, and apparat... |
| 6089181 | Plasma processing apparatus |
| 6090208 | Prevention of clogging in CVD apparatus |
| 6083419 | Polishing composition including an inhibitor of tungsten etching |
| 6079355 | Alignment aid for an electrode plate assembly |
| 6074568 | Dry etching method |
| 6070550 | Apparatus for the stabilization of halogen-doped films through th... |
| 6071343 | Heat treatment jig and method of producing the same |
| 6066230 | Planarization method, workpiece measuring method, and surface ... |
| 6063203 | Susceptor for plasma CVD equipment and process for producing the ... |
| 6062163 | Plasma initiating assembly |
| 6059981 | Fiducial marks for charged-particle-beam exposure apparatus and m... |
| 6053123 | Plasma-assisted metallic film deposition |
| 6050215 | Plasma stream generator with a closed configuration arc |
| 6051499 | Apparatus and method for distribution of slurry in a chemical mec... |
| 6048798 | Apparatus for reducing process drift in inductive coupled plasma ... |
| 6045715 | Method of post-etching a mechanically treated substrate |
| 6044792 | Plasma CVD apparatus |
| 6041734 | Use of an asymmetric waveform to control ion bombardment during ... |
| 6042688 | Carrier for double-side polishing |
| 6042738 | Pattern film repair using a focused particle beam system |
| 6038999 | Device for the relative vacuum deposition of a material on parts ... |
| 6039888 | Method of etching an organic anti-reflective coating |
| 6039835 | Etching apparatus and method of etching a substrate |
| 6036816 | Apparatus for processing a sample having a metal laminate |
| 6036873 | Process for generating precision polished non-plannar aspherical ... |
| 6035803 | Method and apparatus for controlling the deposition of a fluorina... |
| 6035805 | Method and apparatus for vacuum deposition of highly ionized medi... |
| 6037268 | Method for etching tantalum oxide |
Did You Know... 
PatentStorm News
