| Patent No. | Patent Title: |
| 7170611 | Methods and apparatus for splitting, imaging, and measuring wavef... |
| 6885458 | Apparatus and method for determining the active dopant profile in... |
| 6738144 | Non-invasive method and low-coherence apparatus system analysis a... |
| 6727992 | Method and apparatus to reduce effects of sheared wavefronts on i... |
| 6687009 | Method and apparatus for high resolution monitoring of optical si... |
| 6683688 | Method and device for gauging a device for producing electrical c... |
| 6657733 | Method and apparatus for detecting ultrasonic surface displacemen... |
| 6657725 | Scanning type projection exposure apparatus and device production... |
| 6657727 | Interferometers for optical coherence domain reflectometry and op... |
| 6650421 | Method and apparatus for inspecting optical device |
| 6646743 | Method and device for the spectral analysis of light |
| 6639681 | Device for reading spectral lines contained in an optical spectru... |
| 6633384 | Method and apparatus for ultrasonic laser testing |
| 6631003 | Uncorrelated michelson interferometer |
| 6631001 | Spectral image input device |
| 6614534 | Method and apparatus for combined measurement of surface non-unif... |
| 6608681 | Exposure method and apparatus |
| 6600565 | Real-time evaluation of stress fields and properties in line feat... |
| 6594022 | Wavelength reference device |
| 6587211 | Interferometric torque and power sensor |
| 6559938 | Backside contamination inspection device |
| 6559948 | Method for locating a structure using holograms |
| 6559947 | Reference fringe counting fourier transform spectroscopy |
| 6556742 | Optical wavelength division multiplexed system using wavelength s... |
| 6552808 | Methods and apparatus for splitting, imaging, and measuring wavef... |
| 6542244 | Variable sensitivity acoustic transducer |
| 6542246 | Blood vessel imaging system |
| 6535290 | Optical position measuring device with a beam splitter |
| 6525820 | Rayleigh scattering optical flux monitor |
| 6525821 | Acquisition and replay systems for direct-to-digital holography a... |
| 6507405 | Fiber-optic interferometer employing low-coherence-length light f... |
| 6504614 | Interferometer spectrometer with reduced alignment sensitivity |
| 6496262 | Holographic particle image velocimetry apparatus and methods |
| 6493088 | Method and apparatus for high resolution monitoring of optical si... |
| 6490044 | Optimized interferometrically modulated array source |
| 6483594 | Apparatus and method for determining the active dopant profile in... |
| 6476919 | Polarization-independent reflectometry and polarization-independe... |
| 6462827 | Phase-based wavelength measurement apparatus |
| 6462828 | Exposure apparatus |
| 6459487 | System and method for fabricating components of precise optical p... |