| Patent No. | Patent Title: |
| 6758223 | Plasma RIE polymer removal |
| 6736146 | Method of rapidly reworking color filters |
| 6709531 | Chemical liquid processing apparatus for processing a substrate a... |
| 6705332 | Hard floor surface cleaner utilizing an aerated cleaning liquid |
| 6706121 | Device and method for the treatment of semiconductor wafers |
| 6702902 | Method and device for radioactive decontamination of a steel wall |
| 6695928 | Method for production of (meth) acrylic acid and/or (meth)acrylic... |
| 6685848 | METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS ... |
| 6684890 | Megasonic cleaner probe system with gasified fluid |
| 6679272 | Megasonic probe energy attenuator |
| 6675816 | Plasma CVD apparatus and dry cleaning method of the same |
| 6676766 | Method for cleaning a substrate using a sherbet-like composition |
| 6676769 | Apparatus and method for cleaning a furnace torch |
| 6669858 | Integrated low k dielectrics and etch stops |
| 6666987 | Liquid etchant and method for roughening copper surface |
| 6659110 | Method and apparatus for cleaning drums or belts |
| 6659111 | Cleaning gas and method for cleaning vacuum treatment apparatus b... |
| 6655395 | Method and device for scouring and cleaning rolled steel strip |
| 6652659 | Low species buffered rinsing fluids and method |
| 6652663 | Composition for eliminating thermosetting resin |
| 6652658 | Method for machining/cleaning by hydroxide ion in ultrapure water |
| 6641678 | Methods for cleaning microelectronic structures with aqueous carb... |
| 6638365 | Method for obtaining clean silicon surfaces for semiconductor man... |
| 6635118 | Aqueous cleaning of polymer apply equipment |
| 6632289 | Substrate cleaning method and substrate cleaning apparatus |
| 6632291 | Methods and compositions for cleaning, rinsing, and antimicrobial... |
| 6632292 | Selective treatment of microelectronic workpiece surfaces |
| 6632287 | Method for decontaminating a hollow needle |
| 6630032 | Method and apparatus for dislodging accrued deposits from a vesse... |
| 6630031 | Surface purification apparatus and surface purification method |
| 6626188 | Method for cleaning and preconditioning a chemical vapor depositi... |
| 6626196 | Arrangement and method for degassing small-high aspect ratio dril... |
| 6622736 | Water-soluble glass as corrosion protection for glassware in a di... |
| 6616774 | Wafer cleaning device and tray for use in wafer cleaning device |
| 6613157 | Methods for removing particles from microelectronic structures |
| 6607607 | Coiled tubing wellbore cleanout |
| 6607605 | Cleaning of semiconductor process equipment chamber parts using o... |
| 6602351 | Methods for the control of contaminants following carbon dioxide ... |
| 6599370 | Stabilized alkaline compositions for cleaning microelectronic sub... |
| 6596093 | Methods for cleaning microelectronic structures with cyclical pha... |