| Patent No. | Patent Title: |
| 5449435 | Field emission device and method of making the same |
| 5328553 | Method for fabricating a semiconductor device having a planar sur... |
| 5322816 | Method for forming deep conductive feedthroughs |
| 5320706 | Removing slurry residue from semiconductor wafer planarization |
| 5318663 | Method for thinning SOI films having improved thickness uniformit... |
| 5318665 | Method for etching polysilicon film |
| 5314573 | Dry etching polysilicon using a bromine-containing gas |
| 5312773 | Method of forming multilayer interconnection structure |
| 5308438 | Endpoint detection apparatus and method for chemical/mechanical p... |
| 5308415 | Enhancing step coverage by creating a tapered profile through thr... |
| 5304515 | Method for forming a dielectric thin film or its pattern of high ... |
| 5304510 | Method of manufacturing a multilayered metallization structure in... |
| 5302536 | Method of manufacturing a semiconductor device, in which isolated... |
| 5302233 | Method for shaping features of a semiconductor structure using ch... |
| 5300188 | Process for making substantially smooth diamond |
| 5298117 | Etching of copper-containing devices |
| 5296092 | Planarization method for a semiconductor substrate |
| 5290733 | Method of manufacturing semiconductor devices including depositin... |
| 5288661 | Semiconductor device having bonding pad comprising buffer layer |
| 5288666 | Process for forming self-aligned titanium silicide by heating in ... |
| 5286335 | Processes for lift-off and deposition of thin film materials |
| 5286678 | Single step salicidation process |
| 5286677 | Method for etching improved contact openings to peripheral circui... |
| 5282922 | Hybrid circuit structures and methods of fabrication |
| 5273935 | Method of controlling etching with a focused charged beam by dete... |
| 5272115 | Method of leveling the laminated surface of a semiconductor subst... |
| 5269880 | Tapering sidewalls of via holes |
| 5270254 | Integrated circuit metallization with zero contact enclosure ... |
| 5266523 | Method of forming self-aligned contacts using the local oxidation... |
| 5266525 | Microelectronic interlayer dielectric structure and methods of ... |
| 5264387 | Method of forming uniformly thin, isolated silicon mesas on an ... |
| 5262346 | Nitride polish stop for forming SOI wafers |
| 5260235 | Method of making laser generated I. C. pattern for masking |
| 5256248 | Method for patterning semiconductor |
| 5252517 | Method of conductor isolation from a conductive contact plug |
| 5246884 | CVD diamond or diamond-like carbon for chemical-mechanical polish... |
| 5244534 | Two-step chemical mechanical polishing process for producing flus... |
| 5244820 | Semiconductor integrated circuit device, method for producing the... |
| 5244819 | Method to getter contamination in semiconductor devices |
| 5242507 | Impurity-induced seeding of polycrystalline semiconductors |
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