| Patent No. | Patent Title: |
| 5443932 | Exposure method |
| 5427895 | Semi-subtractive circuitization |
| 5427878 | Semiconductor wafer processing with across-wafer critical dimensi... |
| 5422228 | Method of producing thin film multi-layered substrate |
| 5407787 | Process to fabricate thick coplanar microwave electrode structure... |
| 5389497 | Method for forming patterned solder mask |
| 5387495 | Sequential multilayer process for using fluorinated hydrocarbons ... |
| 5366851 | Device fabrication process |
| 5366848 | Method of producing submicron contacts with unique etched slopes |
| 5366847 | Method and apparatus for optimizing semiconductor exposure proces... |
| 5362585 | Seimconductor integrated circuit fabrication utilizing latent ima... |
| 5362608 | Microlithographic substrate cleaning and compositions therefor |
| 5361121 | Periphery exposing method and apparatus therefor |
| 5360697 | Forming self-aligned diffusion barriers in solid state devices us... |
| 5358826 | Method of fabricating metallized chip carries from wafer-shaped ... |
| 5358810 | Method of manufacturing liquid crystal display device |
| 5358825 | Manufacture of printed circuit conductors by a partially additive... |
| 5358827 | Phase-shifting lithographic masks with improved resolution |
| 5350662 | Maskless process for forming refractory metal layer in via holes ... |
| 5330878 | Method and apparatus for patterning an imaging member |
| 5328808 | Method for manufacturing edge emission type electroluminescent de... |
| 5328807 | Method of forming a pattern |
| 5322764 | Method for forming a patterned resist |
| 5320932 | Method of forming contact holes |
| 5316900 | Optical recording medium having a constant birefringent property ... |
| 5316893 | Method of producing electronic switching element |
| 5316895 | Photolithographic method using non-photoactive resins |
| 5314772 | High resolution, multi-layer resist for microlithography and meth... |
| 5312717 | Residue free vertical pattern transfer with top surface imaging r... |
| 5310621 | Semiconductor photolithography with superficial plasma etch |
| 5310622 | Method of patterning a reflective surface in an integrated circui... |
| 5306602 | Method of producing longitudinally fine striped type heat seal co... |
| 5306601 | Fine pattern forming material and pattern forming method |
| 5302495 | Method for the photolithographic production of structures on a su... |
| 5302492 | Method of manufacturing printing circuit boards |
| 5298365 | Process for fabricating semiconductor integrated circuit device, ... |
| 5298363 | Photolithographically patterned fluorescent coating |
| 5296341 | Green light laser imaging method |
| 5296321 | Photorecording element, method for production thereof, and the li... |
| 5296333 | Photoresist adhesion promoter |