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| 7049589 | Pattern inspection method |
| 7049614 | Electrode in a discharge produced plasma extreme ultraviolet sour... |
| 7049587 | Apparatus for inspecting a specimen |
| 7034296 | Method of forming a sample image and charged particle beam appara... |
| 7034292 | Mass spectrometry with segmented RF multiple ion guides in variou... |
| 7030389 | Electron beam apparatus having electron analyzer and method of co... |
| 7026607 | Scanning probe microscope |
| 7015482 | Electron beam writing equipment using plural beams and method |
| 7012262 | Corrector for correcting first-order chromatic aberrations of the... |
| 7005650 | Apparatus for fabricating a semiconductor device |
| 7005641 | Electron beam apparatus and a device manufacturing method by usin... |
| 6998608 | FAIMS with non-destructive detection of selectively transmitted i... |
| 6995365 | Mass analyzer having improved ion selection unit |
| 6992287 | Apparatus and method for image optimization of samples in a scann... |
| 6989543 | Radiation shielding container for radioactive sources |
| 6987278 | Gas flushing system with recovery system for use in lithographic ... |
| 6987263 | High throughput systems and methods for parallel sample analysis |
| 6984820 | Method and apparatus for analyzing hydrocarbon streams |
| 6982428 | Particle detection by electron multiplication |
| 6982427 | Electron beam apparatus with aberration corrector |
| 6977372 | Method for feedback controlled electrospray |
| 6967337 | Toothbrush cleaning assembly |
| 6967324 | Micro matrix ion generator for analyzers |
| 6967342 | Method and apparatus for improved ultraviolet (UV) treatment of l... |
| 6965105 | Scanning system and method for scanning a plurality of samples |
| 6963067 | Scanning electron microscope and sample observing method using it |
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| 6958481 | Decaborane ion source |
| 6953928 | Ion source and methods for MALDI mass spectrometry |
| 6949745 | Electron beam apparatus |
| 6936825 | Process for the decontamination of microlithographic projection e... |
| 6936815 | Integrated shield in multipole rod assemblies for mass spectromet... |
| 6933513 | Gas flushing system for use in lithographic apparatus |
| 6930305 | Method and system for high-throughput quantitation of small molec... |
| 6930316 | Ion implantation system and ion implantation method |